Yeah, the Order 66 scene is set up to 'Anakin's Betrayal'. (Track #4, one of my most played tracks ever.)

Great stuff. The ROTS score is great throughout, I agree. But much of it is either recycling music from the previous movies (it uses virtually every core melody from the entire saga) or is just kind of atonal, atmospheric stuff - like Padme's Ruminations. Because I think that stuff is probably a lot easier to create (and doesn't move me as much emotionally) I don't lend that as much weight.