Sure that sequence is powerful but I remember seeing the audience leaning forwards 45 degrees gripped during the Death Star run in ANH both in 1977 and 1997 (as much down to Hamill's performance as the naive farm boy caught up in an adventure as the special effects and the music) and the utter bewilderment that resulted from the gantry scene in ESB.
In all the films he has responded to machines (or actors dressed as machines) and puppets with such conviction you forget and see them just as differently shaped people (the Dagobah scenes in ESB are an acting masterclass).
Mark didn't do anything new in ROTJ, arguably without all the work he had put in before those sequences wouldn't have had any of the impact it had.
If the PT actors had built up as much of an album of solid characterisation as Mark did in his films the final duel in ROTS would have been much less of a dance.
Visually it's dazzling (at times it's silly but only slightly more silly as some of the conceits in the ROTJ duel) but because we don't have the emotional investment it doesn't mean anything.
Mark pulled off what he did incrementally over three films.
The other carried over characters are running on fumes in ROTJ.