The Order 66-scene has much more impact on me (especially the Youngling-scene) than the rebel pilots dying in ANH. One death that I couldn't be torn up about was Mace Windu's. For some reason, I just find his screams after Anakin cuts off his hand funny. That kinda hurts the drama. But I admit that one of the main factors that makes the Order 66-scene so touching for me is John Williams' music. The death scenes themselves would probably not be that difficult to cope with if the "Anakin's Beatrayal"-theme hadn't been there.