The Order 66 scenes in ROTS came off as emotionally sterile to me. A “montage” scene like that was also very much NOT compatible with typical Star Wars film language, which generally stays anchored to a POV character.

I always thought a better way to depict the purge would be to stay within the POV of one character. They did this reasonably well in Clone Wars Season 7, where we saw the purge from the narrow POV of one Jedi (Ahsoka) trapped on a starship, being pursued by Republic soldiers trying to kill her. I think ROTS should have done something like this, perhaps with Obi-Wan as the POV character. The full extent of the purge should have been implied, happening mostly off screen over a longer time period.