Making of Star Wars (1977)
Making of Empire Strikes Back (1980)
Classic Creatures: Return of the Jedi (1983)
From Star Wars to Jedi: The Making of the Saga (1985)
The Magic & The Mystery (1997)
The Force Returns (1997)
Star Wars: An MTV Movie Special (1997)
Episode I: Unauthorized (2001)
Starwoids
Behind the Scenes: Episode I [An E! Special]
Talking to People about Star Wars [Garrett Gilchrist]
From Star Wars to Star Wars: The History of ILM
Clapperboard: The Empire Strikes Back
Horizon: How to Film the Impossible
The Mythology of Star Wars
that German thing that translates to "Behind the Masks"
...and there's plenty others.